Ultracompliant thermal probe array for scanning non-planar surfaces without force feedback
نویسندگان
چکیده
منابع مشابه
Ultracompliant thermal probe array for scanning non-planar surfaces without force feedback
This paper describes an array of micromachined thermal probes for scanning thermal microscopy for which the structural design and choice of materials virtually eliminate the need for z-axis mechanical feedback in contact mode scans. The high mechanical compliance accommodates significant topographical variation in the sample surface and prevents damage to soft samples. Thin film metal bolometer...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2004
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/15/1/033